Objectives: This study was purposed to compare the micro-morphologies, crystalline structures, and chemical binding structures of titanium oxides that were formed by various oxidation processes. Methods: Natural oxide film (AS-R), yellow oxide film formed by low voltage anodic oxidation (ANO-L), dark gray thick oxide film formed by high voltage anodic spark deposition (ANO-H), and thermally oxidized films heated at 530^oC and 700^oC in air (LH-A and HH-A) and in vacuum (LH-V and HH-V) were fabricated. Characteristics of the surface oxides were analyzed using FE-SEM, XRD, Raman, and XPS. Results: Only scratch lines were seen in AS-R and irregularly shaped oxides were observed in ANO-L. Homogeneously porous oxide film was formed in ANO-H. Granular oxide crystals were formed in LH-A, and sub-micrometer sized large grains were formed in HH-A. Anatase TiO₂ crystal structures were observed in ANO-L and LH-A groups , and those had different growing crystal planes by groups. Anatase and rutile crystal structures were coexisted in HH-V and ANO-H. On high-resolution XPS analysis, TiO₂ peaks were not detected in LH-V unlikely to other groups. In LH-A and HH-A, surface hydroxyl group contents were more than in other sample groups. The contents of the basic hydroxyl group in anodic oxidized films were lower comparing to those in thermal oxidized films treated in air. In case of LH-V, the titanium oxide peaks were not detected and only titanium metal peaks were observed, whereas titanium oxide peaks were observed again in HH-V. Conclusion: It is concluded that the micro-morphologies, crystalline structures, and chemical binding structures of surface titanium oxide films differ depending on the oxide forming processes. And, these differences of surface characteristics could be speculated to affect on the osseointegration ability of the implant surfaces. This work was supported by Korea Research Foundation Grant (KRF-2002-041-E00218).

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